製程與設備
儀器設備
* 氦氣測漏儀: (For vacuum leakage check)
INFICON UL1000
Varian 990 dCLD II
INFICON UL100
* 烤 箱:
低溫烤箱( 20~40℃)
高溫烤箱( 40~200 ℃)
測試平台(Throttle valve)
MKS 683B/1651 Simulator
MKS T3BIA/B & VAT Simulator
AMAT throttle Simulator
MKS valve motor performance Simulator
Valve vacuum seal performance Simulator
Valve device net function Simulator
測試平台(HP/VHP motor)
VHP robot simulator *3
HP motor simulator *3
VXP Robot simulator *1
XP Robot simulator *1
測試平台(ISO/Gat valve)
Heater function test module
Traveling faraday simulator
Valve cycle test simulator
Slit valve cylinder cycle simulator
Gate valve pressure control simulator
Water pump simulator