Process and Equipment
Instruments and equipment
* For vacuum leakage check :
INFICON UL1000
Varian 990 dCLD II
INFICON UL100
* Oven:
Low Temp Oven( 20~40℃)
High Temp Oven( 40~200 ℃)
Testing Platform(Throttle valve)
MKS 683B/1651 Simulator
MKS T3BIA/B & VAT Simulator
AMAT throttle Simulator
MKS valve motor performance Simulator
Valve vacuum seal performance Simulator
Valve device net function Simulator
Testing Platform(HP/VHP motor)
VHP robot simulator *3
HP motor simulator *3
VXP Robot simulator *1
XP Robot simulator *1
Testing Platform(ISO/Gat valve)
Heater function test module
Traveling faraday simulator
Valve cycle test simulator
Slit valve cylinder cycle simulator
Gate valve pressure control simulator
Water pump simulator