Customer Design
Customer Design
Water flow Monitor & interlock
DI-water flow and pressure detector
DI water flow & temperature detector
Flow Profile System forAMAT 200mm HDP Gas Ring
AMAT WCVD CDA pressure Monitor interlock
Fan Speed detector & interlock
RTP seki denko box ripplefactor monitor interlock
Magnet rotation speed detector
Hoop cleaner waterleak interlock
EBARA CMP membranepressure Monitor interlock
Cryo pump Gate valve close/middle position bypass
CMP BEARA slurry flow rate interlock
Axcellis implant Y scan±5V Monitor Interlock
CMP NH4OH & DI WaterFlow Monitor Alarm system
CMP H2O2 Monitor Alarm System
Axcelis HE Affinity Chiller Temperature Monitor Interlock System